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Versatile observation methods to handle a wide range of applic
● Brightfield observation
Color information can be obtained from brightfield (color)
observation. Therefore, brightfield observation can be used
effectively to observe a flaw on a color filter or to locate the
position of an area of corrosion on metal.
● DIC (Differential Interference Contrast) observation
In DIC observation, it is possible to observe a scratch or flaw as
small as a few nanometers in height that could not be observed in
a brightfield observation.
● Laser confocal
Observation with a much higher level of resolution impracticable
with conventional microscopes is now possible through a
combination of a 408 nm laser and confocal optics.
● Laser confocal DIC
Microscopic unevenness on a surface can be observed in three
dimensions in real time, which is impossible with conventional
laser microscopes. Observation of surface conditions with the
level of dimensional reality comparable to that of an SEM has
been made fully possible, opening up a new dimension in surface
profile observation.
Display
Laser printer toner
Reverse face of a wafer
Circuits patterns on wafer
Polymeric film
Non confocal image
Confocal image