8
1) Unit ID 1: Indicates the equipment sending the signal. When
supporting Set ID by the command 1, 4 bits of low ranks of Set ID are
set up.
2) Unit ID 2: Indicates the equipment receiving the signal. When
supporting Set ID by the command 1, 4 bits of higher ranks of Set ID
are set up.
* Set ID : it is the apparatus number assigned to each plasma monitor.
Command 2
Command 2, along with command 1, is a number used to distinguish each
command.
Check Sum (CKS), Error Processing, and ACK
1) The check sum described below and RS-232C no parity are used together for
a check of the received data. The check sum is the lower order 8 bits of one
frame of sent or received data comprising the sum total of Command 1, Unit
ID 1 and 2, Command 2, Data Length, and Data.
Check Sum Example
2) Error Processing
• When the communication interval is vacant for more than 4 ms, thereafter a
Total 208H
DFH 80H 60H 47H 01H 01H 08H
Command1 Unit ID1 Unit ID2 Command2 Data Length Data Check Sum
