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Chapter 2 Operation
2-2
2.2 Film Parameters Setup
The Film Parameters Menu programs the SQM-160 for the materials that will be
deposited as thin films. Nine films can be stored, but only one film is active at any time.
To program film parameters:
1. Press Program to enter program mode.
2. Use the Control Knob to scroll to the desired Film # (1-9).
3. Depress the Control Knob or Next to enter the film parameters menu for the
selected film.
4. Use Next and Prev to move through the film parameters, shown in Display 1.
5. Use the Control Knob to adjust the parameter value, shown in Display2 , to the
desired setting.
6. Press Clear to abandon the change and return to the original setting.
7. Depress the Control Knob to save the displayed value, or press Next to exit without
saving the value. (Pressing either one will take you to the next material parameter.)
8. Press Program to exit the Film Parameters Menu and return to normal mode.
Notes:
1. Refer to the section on Sensor Selection for instructions on setting SENS AVG.
2. A setting of zero for FINL THK, THK SET or TIME SET will disable that function.