Filter
Top Products
Chapter 1 Quick Start
1-1
1.0 Introduction
Congratulations on your purchase of the SQM-160 Deposition Rate/Thickness Monitor.
The SQM-160 is an easy-to-use instrument for measuring many types of thin film
coatings. This chapter will help to get you up and running quickly. Please review the
entire manual for detailed operational, programming, and safety information.
1.1 Installation
Refer to Sections 1.3 and 1.4 for detailed system hookup information.
Rack
Installation
The SQM-160 occupies a 3.5” high, half-rack space. An
optional kit (900-008) is available to adapt to a full rack. Install
the unit in a 19” rack with the supplied hardware.
Power
Connection
WARNING: The SQM-160 is shipped with a ½ A Fuse for use
with 90–120 VAC. If your line voltage is 180–240 VAC, replace
the fuse with the ¼A fuse included with your SQM-160.
WARNING: Verify that the Voltage Selector Switch located next
to the power switch matches your line voltage.
Plug the SQM-160 into your power source with the included
power cord.
Sensor
Connections
Connect the BNC cables and oscillator from your vacuum
chamber feedthrough to the desired SQM-160 Sensor Input(s).
Digital I/O
Connections
Refer to Appendix C for details on wiring digital I/O to the
SQM-160 Relay I/O connector.
Computer
Connection
If you would like to use the supplied Windows software to
collect data or program the SQM-160, attach a 9 pin straight-
thru cable from the SQM-160 RS-232 connector to your
computer’s serial port.
Option
Connections
If you purchased the Analog Output Option (502-021), connect
a BNC cable form the Rate or Thickness connector to your
chart recorder.
Move the rear panel power switch to the On (|) position. The SQM-160 will briefly
display its software version, then go to normal operating mode.