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Chapter 2 Operation
2-7
2.4 Sensor Selection
The SQM-160 comes standard with two sensor inputs. Four additional sensors are
available by adding a Sensor Option Card. The sensors can each be assigned to a
different film, or multiple sensors can be averaged for a single film. The averaging
option provides more uniform coverage of the deposition area, and provides a backup
sensor capability. If one of multiple sensors assigned to a film fails, the sensor is
automatically removed from rate/thickness calculations.
To assign a sensor, or sensors, to a film:
1. Press Program to enter program mode.
2. Use the Control Knob to scroll to the desired Film # (1-9).
3. Depress the Control Knob or Next to enter the film parameters menu for the
selected film.
4. Press Next until SENS AVG is shown.
5. Use the Control Knob to scroll through the sensors in Display2.
6. Depress the Control Knob to toggle the sensor on/off.
Sensor status can be seen by observing the Crystal Status LEDs:
If the LED is not illuminated, the crystal is disabled.
If the LED is illuminated,the crystal is enabled and receiving valid readings.
If the LED is flashing, the crystal is enabled, but is not receiving valid readings.
7. Continue selecting sensors until the Crystal Status LEDs indicate the desired setup.
8. Press Program to exit the Film Parameters Menu and return to normal mode.