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Appendix
B. Specifications
Measurement
Number of Sensors
Frequency Range
Frequency Accuracy
Frequency Resolution
Rate Accuracy
Rate Resolution
Thickness Accuracy
Thickness Resolution
Measurement Filter
Measurement Period
2 standard, plus 4 optional
4.0MHz to 6.0Mhz
.01% @ 2 rdgs/sec.
.1 Hz
.5% typical
.01/.1 Å/s
.5% typical
1 Å
1 to 20 readings
.15 to 2 sec
Film Parameters
Stored Films
Density
Tooling
Z-Factor
Final Thickness
Thickness Setpoint
Time Setpoint
9
0.5 – 99.99 gm/cc
10 – 399 %
0.10 – 10.00
0.000 – 99.99 kÅ
0.000 – 99.99 kÅ
0:00 – 99:59 sec
System Parameters
Simulate Mode
Frequency Mode
Etch Mode
Crystal Fail Minimum.
Crystal Fail Maximum
RS-232 Baud Rate
On/Off
On/Off
On/Off
4.0 to 6.0 MHz
4.1 to 6.1 MHz
2.4/4.8/9.6/19.2 kb/s
General Specifications
Power Supply
Power Consumption
Operating Environment
Storage Environment
Operating Altitude
Rack Dimensions (HxWxD)
Weight
90-140VAC, 180-240VAC, 50-60HZ
20VA
0°C to 50°C
0 to 80% RH non-condensing
-40°C to 70°C
0 to 2,000 meters
88.5mm x 212.7mm x 196.9mm
13.2 kg (6 lbs)
Accessories
Power Cord, Rack Mount Ears,
Relay I/O Connector, RS-232 Cable,
MonComm Software, Manual