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Chapter 2 Operation
2-3
The diagram and table below detail the parameters available in the Film Parameters
Menu:
Display Description Range Default Units
DENSITY
Density of the material being
deposited.
0.5 – 99.99 1.00 gm/cc
TOOLING
Overall tooling Factor for this film.
See the Sensor Tooling section of
this chapter for information on
setting tooling values.
10 – 399 100 %
Z-FACTOR
Z-Factor of the material being
deposited.
0.10 – 10.00 1.0
FINL THK
Desired Final Thickness of
deposited material. Lights Final Thk
LED. Zero is disabled.
0.000 – 99.99 0.500 KÅ
THK SET
Thickness value that closes the
Thickness Setpoint relay and lights
Thk SP LED. Zero is disabled.
0.000 – 99.99 0 KÅ
TIME SET
Elapsed time that closes the Timer
Setpoint relay and lights Time SP
LED. Zero is disabled.
0:00 – 99:59 0 Sec
SENS AVG
Enable/disable crystals for this film.
See the Sensor Selection section of
this chapter for more information.
Enabled/
Disabled
Ch1
Enabled
Program
Film1
Film9
.
.
.
.
.
.
- DENSITY
- TOOLING
- Z-FACTOR
- FINL THK
- THK SET
- TIME SET
- SENS AVG
- 1
- 2
- 3
- 6
.
Film Selection Film Parameters Menu
.
Sub-Menu
Sensors 3 to 6
show only if the
four sensor
option card is
iinstalled.