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Table of Contents
Chapter 1 Quick Start
1.0 Introduction ..................................................................................................................1-1
1.1 Installation.....................................................................................................................1-4
1.2 Front Panel...................................................................................................................1-1
1.3 Rear Panel....................................................................................................................1-2
1.4 System Connections ...................................................................................................1-3
1.5 Film Setup.....................................................................................................................1-5
1.6 Depositing a Film.........................................................................................................1-6
Chapter 2 Operation
2.0 Introduction...................................................................................................................2-1
2.1 Menu Selection............................................................................................................2-1
2.2 Film Parameters Setup...............................................................................................2-2
2.3 System Parameters Setup.........................................................................................2-4
2.4 Sensor Selection.........................................................................................................2-7
2.5 Sensor Min/Max Frequency.......................................................................................2-8
2.6 Sensor Tooling .............................................................................................................2-9
2.7 Rate/Thickness or Frequency Display......................................................................2-10
2.8 Crystal Life Display......................................................................................................2-10
2.9 Zero Thickness.............................................................................................................2-11
2.10 Shutter Operation......................................................................................................
2.11 Simulate Mode...........................................................................................................
Chapter 3 Options
3.0 Introduction...................................................................................................................
3.1 Option Card Installation..............................................................................................
3.2 Four Sensor Card........................................................................................................
3.3 Analog Output Card.....................................................................................................
Chapter 4 MonComm Software
4.0 Introduction...................................................................................................................4-1
4.1 Installation.....................................................................................................................4-1
4.2 Run MonComm............................................................................................................4-1
4.3 Add and Delete Films..................................................................................................4-2
4.4 Download Films............................................................................................................4-3
4.5 Graph Data ...................................................................................................................4-4
4.6 Save Data .....................................................................................................................4-5
4.7 Edit System Parameters.............................................................................................4-6
4.8 Load Defaults ...............................................................................................................4-6