Setup & Operation 2. Specifications
14 G3 Rev.1
Cleanroom-model: G3-***C
The following figures show the additional parts and specifications for Cleanroom-model (Table Top mounting)
when compared with the Standard-model in appearance.
Upper bellows
Plate cover
(For Anti-static)
Cover
for Table Top mounting surface
Exhaust port
Lower bellows
Plate cover
(For Anti-static)