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9-8 Agilent E5250A User’s Guide, Edition 9
Executing Sample Programs
Vth and Capacitance Measurement Program
Figure 9-1 Vth and C Measurement Setup and DUT Connection
Table 9-4 Instrument and DUT Connection
Instrument E5250A
DUT Terminal (via
Connector Plate)
Model No.
Measurement
Port
Input Port Output Port
4155/4156 SMU 1 SMU INPUT 1 OUTPUT 1 MOSFET Drain
SMU 2 SMU INPUT 2 OUTPUT 2 MOSFET Gate
SMU 3 SMU INPUT 3 OUTPUT 3 MOSFET Source
SMU 4 SMU INPUT 4 OUTPUT 4 MOSFET Substrate
4284A Hp, Hc AUX INPUT CV1 OUTPUT 5 Capacitance (H)
Lp, Lc AUX INPUT CV2 OUTPUT 6 Capacitance (L)