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Non-coaxial Measurements
The capability of making non-coaxial measurements is available with the HP 8753 family of
analyzers with
TRL*
(thru-reflect-line) or
LRM*
(line-reflect-match) calibration. For in-depth
information on
TRL*/LRM*
calibration, refer to Chapter 6, “Application and Operation
Concepts.
n
Non-coaxial, on-wafer measurements present a unique set of challenges for error correction in
the analyzer:
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The close spacing between the microwave probes makes it difficult to maintain a high degree
of isolation between the input and the output.
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The type of device measured on-wafer is often not always a simple two-port.
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It may be difficult to make repeatable on-wafer contacts due to the size of the device contact
pads
Due to the simplicity of the calibration standards,
TRL*
or
LRM+
calibrations may be used
for non-coaxial applications such as on-wafer measurements. This type of calibration with
time domain gating and a variety of probe styles can provide optimal accuracy in on-wafer
measurements. At frequencies where on-wafer calibration standards are available, short,
open, load,
thru
(SOLI’)
calibrations can also be done and may be preferred due to the better
accuracy of the
SOI.
calibration method.
For information on how to perform
TRL*
or
LRM*
calibrations, refer to the section
“TRL+
and
TRIW
Error-Correction” in Chapter 5, “Optimizing Measurement Results”
Making Measurements
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